| 摘要 |
PURPOSE:To improve the irradiation efficiency by modulating either of the laser beam by an optical modulator capable of increasing the modulating speed, and modulating the other laser beam by rocking reflecting mirror when the laser beam is scanned in X and Y directions for irradiation. CONSTITUTION:The laser beam L outputted by a laser beam device 11 is split into a plurality of split beams L1-L3. Drivers 15a-15b apply the prescribed power and frequency to optical modulators 14a-14c by the signal of a control device 16 to modulate the intensity and the angle of the split beams L1-L3. The split beams L1-L3 reach the initial position of a work 21 through a reflecting mirror 23 and a converging lens 25, and after scanning the whole length in X direction, the reflecting mirror 23 is rocked and the beam is deflected in Y direction by the distance equal to the spot diameter and returned to X direction for scanning. Because the optical modulators 14a-14c can increase the modulating speed by applying the higher frequency compared with the rocking of the reflecting mirror 23, the irradiation efficiency of the laser beam can be improved. |
