INSPECTION DEVICE AND METHOD

摘要

A device for the visual inspection of a specimen (21), comprising a first microscope (20) for obtaining a magnified view of different areas of a specimen (21), a display monitor (14) for displaying images of at least a subset of the different areas of the specimen (21), selection means (18) for enabling the selection of an image displayed on the monitor, a second microscope (20a) for review of an area of the specimen (21) corresponding to the selected image, a motorized stage for positioning said specimen (21) with respect to the field of view of the second microscope (20a), and a processor (16a) for determining the image selected and instructing the motorized stage to position the specimen (21) so that the area of the specimen (21) corresponding to the selected image is in the field of view of the second microscope (20a).