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发明名称
Verfahren zur Lichtbogenbedampfung eines Substrates
摘要
申请公布号
DE3417462(C3)
申请公布日期
1996.02.08
申请号
DE19843417462
申请日期
1984.05.11
申请人
VAPOR TECHNOLOGIES, INC., MOUNT VERNON, N.Y., US
发明人
PINKHASOV, EDUARD, FOREST HILLS, N.Y., US
分类号
C23C14/24;C04B41/81;C23C14/22;C23C14/32;F03H99/00;H01J37/32;H05K1/03;H05K3/38;(IPC1-7):C23C14/22;C23C14/06
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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