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发明名称
Korpuskularbestrahlungsverfahren mit einer Maske
摘要
申请公布号
DE68925266(D1)
申请公布日期
1996.02.08
申请号
DE19896025266
申请日期
1989.10.27
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
SAKAMOTO, KIICHI, TOSHIMA-KU TOKYO, 170, JP
分类号
H01L21/30;G03F1/14;G03F1/16;H01L21/027;(IPC1-7):G03F1/14;G03F7/22
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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