Method and apparatus for fabricating microstructures on a photosensitively layered substrate by means of focussed laser radiation,申请号EP19910109849-传众专利搜索

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发明名称	Method and apparatus for fabricating microstructures on a photosensitively layered substrate by means of focussed laser radiation
摘要
申请公布号	EP0467076(B1)	申请公布日期	1996.02.07
申请号	EP19910109849	申请日期	1991.06.15
申请人	MICRONIC LASER SYSTEMS AB	发明人	THUREN, ANDERS;SANDSTROEM, TORBJOERN
分类号	H04N1/04;G03F1/08;G03F7/20;G06K15/12;H04N1/40;(IPC1-7):G03F7/20	主分类号	H04N1/04
代理机构		代理人
主权项
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