发明名称 METHOD FOR PACKAGING OPTICAL ELEMENT
摘要 PURPOSE:To provide a method for packaging an optical integrated device which improves a yield. CONSTITUTION:A mechanism 16 for detecting the force acting on an optical element 1 at the time of press welding the optical element 1 to a substrate 4 is disposed and the movement of an element moving mechanism 3 is controlled by a control circuit 12 in accordance with the value detected by a force detecting circuit 17 so as to be the force const. As a result, the optical element is packaged on the substrate always under the same conditions and, therefore, the yield is improved and the optical integrated device of a low cost is produced.
申请公布号 JPH0836116(A) 申请公布日期 1996.02.06
申请号 JP19940170709 申请日期 1994.07.22
申请人 HITACHI LTD 发明人 UCHIDA FUMIHIKO;HABU TORU;KATO TAKESHI
分类号 G02B6/13;(IPC1-7):G02B6/13 主分类号 G02B6/13
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