Couche antiréfléchissante et procédé pour fabriquer un dispositif semi-conducteur en utilisant une telle couche.

摘要

A method for manufacturing an anti-reflective layer comprises the steps of coating a polymer solution containing at least one compound selected from the group consisting of phenol-based resins, water-soluble resins and acryl resins as a main component, and then baking at a high temperature. The method is simplified and the layer's reflectance is greatly enhanced.