Light-sensitive material useful as photoresist with short wavelength light

摘要

Light-sensitive material (A) contains a cpd. (IA) with a terpenoid skeleton. Also claimed are light-sensitive material (B) contg. a cpd. with a functional gp. decomposed or crosslinked by acid as resin base and a cpd. (IB) with a terpenoid skeleton as photoacid generator; and light-sensitive material (C) contg. a cpd. with an alkali-soluble gp. as resin base, a solubility inhibitor and (IB).