WAFER TREATMENT DEVICE,申请号JP19950178136-传众专利搜索

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发明名称	WAFER TREATMENT DEVICE
摘要
申请公布号	JPH088239(A)	申请公布日期	1996.01.12
申请号	JP19950178136	申请日期	1995.06.21
申请人	KOKUSAI ELECTRIC CO LTD	发明人	SATO SATOSHI
分类号	C23C16/44;C23C16/455;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/306	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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