发明名称 X-RAY IRRADIATION SYSTEM FOR MICROAREA
摘要 PURPOSE:To obtain an X-ray irradiation system for microarea by which an X-ray irradiation test can be conducted conveniently and quickly for a microarea on a biological sample. CONSTITUTION:The microarea X-ray irradiation system comprises an X-ray source 20, a visible light source 13, an optical system 25 for condensing the light from the X-ray source or the visible light source toward a sample in a sample case 26, an optical system 27 for imaging a pattern condensed through the condenser optical system 25, an image pickup means 29 disposed at the imaging position of the imaging optical system 27, a vessel 18 for evacuating the optical path between the X-ray source 20 and the image pickup means 29, and means 30 for evacuating the vacuum vessel 18. In such X-ray irradiation system, an X-ray and visible light transmissive window is made through one of two faces intersecting the optical path of the sample case 26 and a visible light transmissive window is made through the other face. The area of the visible light transmissive window is set larger than that of the X-ray and visible light transmissive window.
申请公布号 JPH085579(A) 申请公布日期 1996.01.12
申请号 JP19940134722 申请日期 1994.06.16
申请人 NIKON CORP 发明人 FUJISAKI HISAO;TAKAHASHI SHINICHI
分类号 G01N23/02;G01N1/00;G01N1/28;G21K5/02 主分类号 G01N23/02
代理机构 代理人
主权项
地址