,申请号JP19890246513-传众专利搜索

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发明名称
摘要
申请公布号	JPH07122135(B2)	申请公布日期	1995.12.25
申请号	JP19890246513	申请日期	1989.09.25
申请人		发明人
分类号	C23C14/34;C23C14/35;C23C14/56;H01L21/203;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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