METHOD OF FABRICATING CAPACITOR COMPRISING TANTALUM OXIDE IN MULTILAYER INTERCONNECTION SUBSTRATE,申请号JP19940125995-传众专利搜索

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发明名称	METHOD OF FABRICATING CAPACITOR COMPRISING TANTALUM OXIDE IN MULTILAYER INTERCONNECTION SUBSTRATE
摘要
申请公布号	JPH07335830(A)	申请公布日期	1995.12.22
申请号	JP19940125995	申请日期	1994.06.08
申请人	SUMITOMO METAL IND LTD	发明人	YUU AKIO;IWASAKI TAKESHI
分类号	H01L27/04;H01G4/33;H01L21/822;(IPC1-7):H01L27/04	主分类号	H01L27/04
代理机构		代理人
主权项
地址

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