| 摘要 |
<p>PURPOSE:To detect a wafer cassette correctly and positively without being subject to the effects of disturbance light and the micro-vibrations of an elastic plate, to simplify the shape of the elastic plate and to facilitate adjustment for detecting the wafer cassette. CONSTITUTION:The base end section 6A of an elastic plate 6, in which a button 10 projected from a plate surface is mounted at a free end section, is fixed onto a magazine plate 9 for a cassette stage or a cassette shelf, on which a wafer cassette 4 is placed, and a micoswitch 5 operated by the button 10 is installed onto the elastic plate 6.</p> |
