| 摘要 |
<p>PURPOSE:To obtain an element with low operating voltage, whose capacitance can be varied greatly by allowing one side electrode to be supported by a supporting member extending from a substrate where the other electrode is provided and constituting the supporting member of a piezoelectric element so as to transfer one side electrode with respect to the other electrode by impressing prescribed voltage on the piezoelectric element. CONSTITUTION:In a capacitor 1, a lower electrode 4 is formed on a substrate 3 and an upper electrode 6 is provided above the lower electrode 4 facing thereto. Further, a piezoelectric electrode 5 as a supporting part is integrally formed on the upper part of the upper electrode 6. The piezoelectric element 5 is composed of a first piezoelectric electrode 8 as a piezoelectric electrode 12 and a piezoelectric material 10 formed between these first piezoelectric electrode 8 and second piezoelectric electrode 12 so as to longitudinally extend and contract by impressing DC voltage between the first electrode 8 and the second electrode 12. Thereby, displacement of piezoelectric member can largely move the electrode so as to enlarge the variation width of capacitance.</p> |
