| 摘要 |
PURPOSE:To obtain a novel sulfonium salt which is represented by a specific formula and suitably useful as a chemically ampllficative positive resist material because of its high resolution suiting fine processing techniques. CONSTITUTION:This compound is represented by formula I (R<1> is H, an alkyl, an alkoxy; Y is trifluoromethanesulfonate, p-toluenesulfonate), for example, bis(p-t-butoxyphenyl)phenylsulfonium trifluoromethanate. The compound of formula I is prepared by reaction of, for example, (p-t-butoxyphenyl)sulfoxide of formula II with trimethylsilyl-sulfonate and an aryl Grignard reagent. |
