PLASMA DEVICE AND PLASMA CVD METHOD USING THE SAME,申请号JP19940119339-传众专利搜索

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发明名称	PLASMA DEVICE AND PLASMA CVD METHOD USING THE SAME
摘要
申请公布号	JPH07326581(A)	申请公布日期	1995.12.12
申请号	JP19940119339	申请日期	1994.05.31
申请人	SONY CORP	发明人	KADOMURA SHINGO
分类号	H05H1/46;H01L21/205;H01L21/22;H05H1/50;(IPC1-7):H01L21/205	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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