| 摘要 |
<p>PURPOSE:To provide an electron source in which short circuit scarcely occurs between upper and lower circuit wires and which has excellent coverage in a step part of an element electrode and the upper circuit wire, no flash in the upper face end part of the element electrode, little unevenness of properties, and good adhesion strength to a base material of a wiring pattern. CONSTITUTION:A contact hole is so made as to be a multistep shape with one or more steps, an element electrode is formed by pattern forming by a dry etching method, a circuit is formed by forming a prescribed resist pattern, ozone-ashing the pattern under ultraviolet-ray radiation, and then forming a film of a wiring material and thus an electron source is manufactured and an image forming apparatus is manufactured by using the electron source.</p> |
