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发明名称
Verfahren zur Bildung von Vacuummikrokammern zur Einbettung von Vorrichtungen der Mikroelektronik.
摘要
申请公布号
DE69205753(D1)
申请公布日期
1995.12.07
申请号
DE19926005753
申请日期
1992.07.30
申请人
TEXAS INSTRUMENTS INC., DALLAS, TEX., US
发明人
BOYSEL, R. MARK, PLANO, TEXAS 75075, US
分类号
H01J9/40;H01J9/02;H01J21/06;(IPC1-7):H01J9/02;H01L21/52;H01L23/02
主分类号
H01J9/40
代理机构
代理人
主权项
地址
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