Positioning device for substrates processing

摘要

At least two magnets (10) are fitted to the underside of the table (1) and magnets (11) aligned with these in the ground plate (6), both capable of being displaced and turned and applying a magnetic force between the ground plate and the table in order to hold the table in a central position. There is a control arrangement (12), in the form of a pneumatic cylinder, for fixing a substrate (7) in the required position.