申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
TAKAGO, TOSHIO, ANNAKA-SHI, GUNMA-KEN, JP;INOMATA, HIROSHI, ANNAKA-SHI, GUNMA-KEN, JP;TARUMI, YASUO, TAKASAKI-SHI, GUNMA-KEN, JP;YAMAGUCHI, HIROMASA, ANNAKA-SHI, GUNMA-KEN, JP;FUKUDA, KENICHI, TAKASAKI-SHI, GUNMA-KEN, JP |