发明名称 |
Verfahren und Vorrichtung zum Messen der dreidimensionalen Anordnung eines drahtartigen Objekts in kurzer Zeit. |
摘要 |
A method of measuring a wire-shaped object (1, 11) comprises a scanning step of scanning a light beam (LB) on the surface of the wire-shaped object (1, 11), a detection step of detecting a reflected light (RL) reflected from the surface of the wire-shaped object (1, 11) by a plurality of optical sensor cells (21), the optical sensor cells (21) being mounted on an inner wall (2a) of a reflected light detection unit (2, 20) located over the wire-shaped object (1, 11); and a measurement step of measuring a three-dimensional configuration of the wire-shaped object (1, 11) in accordance with output signals from the plurality of optical sensor cells (21), whereby, the three-dimensional configuration of the wire-shaped object (1, 11) is automatically measured in a short time. <IMAGE> |
申请公布号 |
DE69113696(D1) |
申请公布日期 |
1995.11.16 |
申请号 |
DE1991613696 |
申请日期 |
1991.07.04 |
申请人 |
FUJITSU LTD., KAWASAKI, KANAGAWA, JP |
发明人 |
ANDO, MORITOSHI, ATSUGI-SHI, KANAGAWA 243, JP;TSUKAHARA, HIROYUKI, ATSUGI-SHI, KANAGAWA 243, JP;OSHIMA, YOSHITAKA, ISEHARA-SHI, KANAGAWA 259-11, JP |
分类号 |
H01L21/00;H01L21/66;H05K13/08 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|