发明名称 Verfahren und Vorrichtung zum Messen der dreidimensionalen Anordnung eines drahtartigen Objekts in kurzer Zeit.
摘要 A method of measuring a wire-shaped object (1, 11) comprises a scanning step of scanning a light beam (LB) on the surface of the wire-shaped object (1, 11), a detection step of detecting a reflected light (RL) reflected from the surface of the wire-shaped object (1, 11) by a plurality of optical sensor cells (21), the optical sensor cells (21) being mounted on an inner wall (2a) of a reflected light detection unit (2, 20) located over the wire-shaped object (1, 11); and a measurement step of measuring a three-dimensional configuration of the wire-shaped object (1, 11) in accordance with output signals from the plurality of optical sensor cells (21), whereby, the three-dimensional configuration of the wire-shaped object (1, 11) is automatically measured in a short time. <IMAGE>
申请公布号 DE69113696(D1) 申请公布日期 1995.11.16
申请号 DE1991613696 申请日期 1991.07.04
申请人 FUJITSU LTD., KAWASAKI, KANAGAWA, JP 发明人 ANDO, MORITOSHI, ATSUGI-SHI, KANAGAWA 243, JP;TSUKAHARA, HIROYUKI, ATSUGI-SHI, KANAGAWA 243, JP;OSHIMA, YOSHITAKA, ISEHARA-SHI, KANAGAWA 259-11, JP
分类号 H01L21/00;H01L21/66;H05K13/08 主分类号 H01L21/00
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