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发明名称
GAAS SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号
JPH07302739(A)
申请公布日期
1995.11.14
申请号
JP19940094588
申请日期
1994.05.09
申请人
HITACHI CABLE LTD
发明人
KUNITAKE EIICHI
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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