| 摘要 |
<p>PURPOSE:To increase the accuracy and lengthen the operating life of a sample moving base and to simplify assembling and adjusting work by eliminating the effect of deadweight of a table itself on a sample moving base such as semiconductor production apparatus or inspection apparatus using a crossed roller guide. CONSTITUTION:Four deadweight cancellers 18 are provided to an intermediate table, and application of the deadweight in the intermediate table directly to a roller is avoided. This deadweight canceller 18 comprises a bearing, leaf spring and load adjusting plate; according to its construction, if a load adjusting plate is pressed down by an adjust screw 19 screwed into an intermediate table 9, the leaf spring is bent around shaft as the center, and a force F for pushing a base table 8 by the bearing is increased.</p> |
