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发明名称
CONDENSER LENS FOR PROJECTION INSPECTION EQUIPMENT AND FINITE DISTANCE LENS INSPECTING TOOL
摘要
申请公布号
JPH07301579(A)
申请公布日期
1995.11.14
申请号
JP19940117411
申请日期
1994.05.09
申请人
CANON INC
发明人
KOBAYASHI MASASHI
分类号
G01M11/00;G02B19/00;(IPC1-7):G01M11/00
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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