| 摘要 |
PURPOSE:To accurately perform quantitative analysis by finding an electric current radiated to a surface of a sample by a signal from an electric current detector, and correcting X-ray intensity detected by a detector. CONSTITUTION:An electron beam 2 from an electron gun 1 is focused by a focusing lens 3 and an objective lens 4, and is radiated to a microscopic area on a surface of a sample 5. A generated X-ray 6 is detected by an X-ray detector 7, and an output signal is processed by an X-ray microanalyzer body 8, and the distribution of X-ray intensity is displayed on a display 9. A sample electric current detector 11 of a sample stage 10 detects a sample electric current, and digitizes it by an A/D converter 13 in the body 8 through an amplifier 12. An output average value of the converter 13 is set as an average value of the sample electric current. A Faraday gauge is beforehand placed on the sample 5, and when proportional constants of a radiating electric current and the sample electric current on the sample 5 are found, the radiating electric current can be accurately found from the sample electric current. In this way, accurate quantitative analysis becomes possible. |
