发明名称 Method of manufacturing integrated circuit and integrated circuit made thereby.
摘要 <p>An integrated circuit is manufactured by forming first and second regions on silicon dioxide (4, 6) on a semiconductor substrate (1). The first and second regions comprise a polycrystalline silicon layer (7), an insulating layer (8), and a polycrystalline silicon layer (9). The layers (8) and (9) are removed from the second regions and a second insulating layer (10) formed on the second regions. A third polycrystalline layer (11) is formed on the first and second regions. The first regions may be formed as EPROM memory cells and the second regions as capacitors. <IMAGE></p>
申请公布号 EP0435534(B1) 申请公布日期 1995.11.08
申请号 EP19900313667 申请日期 1990.12.14
申请人 SGS-THOMSON MICROELECTRONICS S.R.L. 发明人 RE, DANILO;MAURELLI, ALFONSO
分类号 H01L21/02;H01L21/76;H01L21/822;H01L21/8238;H01L21/8247;H01L27/04;H01L27/06;H01L27/10;H01L27/105;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/82 主分类号 H01L21/02
代理机构 代理人
主权项
地址