发明名称 |
Method of manufacturing integrated circuit and integrated circuit made thereby. |
摘要 |
<p>An integrated circuit is manufactured by forming first and second regions on silicon dioxide (4, 6) on a semiconductor substrate (1). The first and second regions comprise a polycrystalline silicon layer (7), an insulating layer (8), and a polycrystalline silicon layer (9). The layers (8) and (9) are removed from the second regions and a second insulating layer (10) formed on the second regions. A third polycrystalline layer (11) is formed on the first and second regions. The first regions may be formed as EPROM memory cells and the second regions as capacitors. <IMAGE></p> |
申请公布号 |
EP0435534(B1) |
申请公布日期 |
1995.11.08 |
申请号 |
EP19900313667 |
申请日期 |
1990.12.14 |
申请人 |
SGS-THOMSON MICROELECTRONICS S.R.L. |
发明人 |
RE, DANILO;MAURELLI, ALFONSO |
分类号 |
H01L21/02;H01L21/76;H01L21/822;H01L21/8238;H01L21/8247;H01L27/04;H01L27/06;H01L27/10;H01L27/105;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/82 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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