| 摘要 |
PURPOSE:To continuously and smoothly move travelling objects in various directions along a certain plane. CONSTITUTION:The feed device is provided with a driving unit 7. The driving unit 7 is provided with four supporting blocks 1a, 1b, 1c and 1d so as to sandwitch a travelling table 9 from upper and lower surfaces. The supporting blocks 1a to 1d are respectively provided with three piezoelectric elements 3a, 3b, etc., independently displaced in three directions. A sandwitching member 5 for clamping a travelling object is held by means of these three piezoelectric elements 3a, 3b, etc. A clamping surface 6 for clamping the travelling table 9 is provided on the surface of this sandwitching member 5. |
