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发明名称
VAPOR CLEANER
摘要
申请公布号
JPH07283189(A)
申请公布日期
1995.10.27
申请号
JP19940099227
申请日期
1994.04.12
申请人
NIPPON STEEL CORP
发明人
SHIMANOE NORITAKE;KUBOTA KAZUHIKO;OTSUKA SUSUMU;KAMIMURA KENICHI;MORI YOSHIHIRO
分类号
B08B3/08;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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