发明名称 LIQUID PHASE EPITAXY DEVICE
摘要 PURPOSE:To suppress formation of natural nuclei in a raw material melt and to obtain an oxide single crystal having good crystallinity by combining an electrically insulating furnace core tube having a high-frequency heating source on its outer side, an electrical conductor opened at its top and bottom and a crucible. CONSTITUTION:The Fe2O3, Y2O3 which are the oxides of elements constituting garnet and PbO, B2O3 as a flux are packed into the crucible 6 made of platinum. The crucible 6 is then placed on a supporting base 7 and thereafter, a current is passed to the high-frequency coil 11 to inductively heat a cylindrical body 12 made of platinum. The raw materials in the crucible 6 are heated to about 1200 deg.C by radiation heat generated in such a manner, by which the raw materials are by heat melted and homogenized. A ground surface substrate 6 is then preheated by the radiation heat from the platinum cylindrical body 12. The ground surface substrate 8 is immersed into a soln. 5 of the raw materials and is rotated forward and backward in the specified position for the prescribed time to allow a magnetic garnet single crystal film to grow. Finally, the ground surface substrate is rotated at a high speed above the soln. 5, by which the 8 soln. sticking onto the grown magnetic garnet single crystal film is shaken off.
申请公布号 JPH07277881(A) 申请公布日期 1995.10.24
申请号 JP19940069402 申请日期 1994.04.07
申请人 MURATA MFG CO LTD 发明人 FUJINO MASARU;TAKAGI HIROSHI
分类号 C30B19/02;C30B19/06;C30B29/28 主分类号 C30B19/02
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