| 摘要 |
PURPOSE:To increase oscillation efficiency by synchronizing the microwave output of pulses which is outputted from a plurality of microwave power supplies and injected in the same space. CONSTITUTION:This microwave excited gas laser oscillator is constituted of a signal setting part 1 for outputting a signal for setting a microwave output, a reference triangular wave signal generating part 2 and a comparison output part 3 including a PWM circuit for comparing a reference triangular wave signal which is steep in rising and falling with an output setting signal to output a driving signal (PWM signal) for driving microwave power supplies 12a, 12b, 12c, 12d. Since the mutual synchronization of pulse-like microwave outputs can be necessarily secured by using the steeply rising and falling reference triangular wave even when the output setting signal of the mutual microwave power supply 12 is changed, the oscillation efficiency can be increased. |
