APPARATUS FOR INSPECTION OF COLOR FILTER

摘要

PURPOSE:To provide a color filter inspection apparatus wherein the scattering of an inspection light due to pigment particles in a coloring layer of a color filter is lowered and the discrimination of a defective projection is facilitated. CONSTITUTION:In the apparatus, a light source 3 for inspection of reflection on a thin film face that emits an inspection light in a direction parallel to the thin film face 12 of a coloring layer is arranged in a line on at least one edge of a color filter substrate 10 in terms of a stage 2 holding the color filter 10.