| 摘要 |
PURPOSE:To dispense with an alignment operation through which an irradiating laser beam is aligned in a dividing process wherein a multilayer body is divided into unit solar cells by a laser beam preventing electrode layers from being short-circuited, wherein a first electrode layer, a photoelectric conversion amorphous semiconductor layer, and a transparent second electrode layer are successively formed in this sequence on an insulating substrate for the formation of the body. CONSTITUTION:A first laser beam used for processing a first electrode layer 2 and a semiconductor layer 3 and a second laser beam which is larger in spot diameter than the first laser beam or possessed of two or more spots and used for processing a second electrode layer 4 are made to irradiate 21 work concurrently making their processing lines overlap each other, whereby an aligning operation can be dispensed with. The second laser beam used for processing the second electrode layer 4 is lessened in energy density or wavelength, whereby it is prevented from processing the layers 2 and 3 other than the layer 4. |
