VAPOR GROWTH DEVICE,申请号JP19940050125-传众专利搜索

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发明名称	VAPOR GROWTH DEVICE
摘要
申请公布号	JPH07263351(A)	申请公布日期	1995.10.13
申请号	JP19940050125	申请日期	1994.03.22
申请人	HITACHI LTD	发明人	MURAOKA KOJI;MIKI HIROSHI;KANETOMO MASABUMI
分类号	C23C14/34;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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