Verfahren und Anordnung zur Kontrolle des Inhaltes von Bildern

摘要

In order to inspect the content of images, in particular masks used to produce integrated circuits, a process and device are disclosed. A real image and an ideal image which are both decomposed in picture elements arranged in columns and rows are scanned along x and y coordinates. An x and a y marginal images are thus produced then scanned in the y and x directions to form x/y and y/x marginal images. By calculating the differences between the y/x and x/y marginal images of the real image on the one hand and of the ideal image on the other hand, a real differential image and an ideal differential image are produced. A real comparison image is produced by comparing the real differential image with the ideal differential image. Finally, the ideal differential image is scanned in itself and a defects-containing image is generated that makes it possible to decide whether the real image may be further used or not.