Pressure transducer apparatus and method for making same.

摘要

A capacitive pressure transducer has a ceramic body with a closed cavity adjacent to the top surface. The cavity has electrically conductive layers (18, 20) on the top and flat bottom walls. A via extends radially from the top wall layer to a terminal pad inwardly of the body outer periphery and a second via (20a) extends from the bottom wall layer up the outwardly angled sidewall (28) to a joinder pad (120b) inwardly of the periphery and spaced from the terminal pad, and aligned with a second terminal pad (20c). The pads are all in the same plane and two bores (38) extend from the body bottom to the two terminal pads, the second extending through the joinder pad. A terminal pin (36) in each bore is secured to the terminal pad, pref. with a conductive epoxy compsn.