发明名称 HEAT TREATING FURNACE, AND MANUFACTURE THEREOF
摘要 PURPOSE:To provide a heat treating furnace and a method for manufacturing the same in which operability is improved, a manufacturing time is shortened, and an accuracy of an arranging pitch of heat generating resistors is improved. CONSTITUTION:A heat treating furnace 1 comprises spiral heat generating resistors 9 along an inner wall surface of a cylindrical heat insulator 10, and a support 18 divided into a plurality in an axial direction of the insulator 10 to support the resistors 9. The supports 18 have a plurality of support pieces extended radially outward via pitches of the resistors 9 at a base disposed inside the resistors 9, wherein the ends of the pieces are buried in the insulator 10. Thus, since its structure is simplified, its manufacture is facilitated, operability is improved, its manufacturing time is shortened, and an accuracy of arranging pitch of the resistors 9 is improved.
申请公布号 JPH07253276(A) 申请公布日期 1995.10.03
申请号 JP19940071552 申请日期 1994.03.16
申请人 TOKYO ELECTRON LTD;TOKYO ELECTRON TOHOKU LTD 发明人 HIDANO MASARU;MIURA TAKAAKI;YOKOGAWA OSAMU
分类号 H05B3/06;F27B5/04;F27B5/14;F27B17/00;F27D11/02;G05D23/19;H01L21/22;H01L21/324;(IPC1-7):F27B5/04 主分类号 H05B3/06
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