发明名称 Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique
摘要 A method and device are provided for reducing the loss of CVD manufactured parts due to cracking caused by mechanical stresses resulting from the mismatch of the coefficient of thermal expansion between the chemical vapor deposed part and the mandrel plate. The method and device provide a removable mandrel support which is removed after the chemical vapor deposition but prior to the cooling of the CVD part and the mandrel plates. This permits the CVD part to contract upon cooling without mechanical restriction, thus reduce cracking caused by contraction of the CVD part against a mold which does not contract substantially.
申请公布号 US5453233(A) 申请公布日期 1995.09.26
申请号 US19930042942 申请日期 1993.04.05
申请人 CVD, INC. 发明人 TEVEROVSKY, ALEXANDER;MACDONALD, JAMES C.
分类号 C23C16/44;C23C16/01;C23C16/458;(IPC1-7):C23C16/00 主分类号 C23C16/44
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