| 摘要 |
<p>PURPOSE:To control the positioning operation of a stage device with desired control characteristics in the whole extent of the moving stroke of the device and to improve the positioning accuracy of the stage device. CONSTITUTION:A controlled variable u2(k) is found from a deviation of a target position xs, which is fed from a subtracting means 28, from measured coordinates x(k) by an integrating means 30, a controlled variable u(k) consisting of a deviation of the controlled variable u2(k) from a controlled variable u1ij(k) from a gain multiplying means 37 is fed to an X-axis drive system 34, a state vector <xij(k)>, which is found from the measured coordinates x(k) and the controlled variable u(k) in a state observation means 38, is fed to the means 37 and the inner product of the state vector and a gain vector <Gij> is the controlled variable u1ij(k). A numeric model and the like in the means 38 are modified via a model selector 39 or the like according to the target position xs.</p> |
