Target holder, target and use thereof,

摘要

Target holder for mounting and demounting a target on a vaporizing source, with spring loaded locking pins (24) which engage grooves (18) in the target (1) when the latter is inserted and sliders (24) for withdrawal of the locking pins (24). With pressurisation of the cooling system (9) a heat transmission membrane (7) is pressed against the rear side of the target and presses the target (1) against the engaged locking pins (14). A target and the use is also claimed. Use - For vapor deposition plants. Advantage - Enables fast, substantially frictionless target mounting and demounting without the use of tools.