发明名称 Improvements in or relating to electrodes for LSI.
摘要 <p>In the capacitor, electrode, or wiring having alpha ray emitting source (in particular, Pt electrode), a layer (alpha ray shielding layer) (18), which has at least one type selected from the group of nickel, cobalt, copper, and tungsten, their compounds or alloys made of at least two types of them, and compounds and alloys made of them and silicon is provided. It is possible to shield off the alpha ray effectively, to suppress generation of soft errors, to enable use of Pt and other new materials in making the electrodes and wiring, and to reduce the cost of the mold resin. &lt;IMAGE&gt;</p>
申请公布号 EP0671768(A2) 申请公布日期 1995.09.13
申请号 EP19950102002 申请日期 1995.02.14
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 NUMATA, KEN;AOKI, KATSUHIRO;FUKUDA,YUKIO;NISHIMURA,AKITOSHI
分类号 H01L21/3205;H01L21/822;H01L21/8242;H01L21/8246;H01L23/52;H01L27/04;H01L27/10;H01L27/105;H01L27/108;H01L27/115;(IPC1-7):H01L27/115 主分类号 H01L21/3205
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