| 摘要 |
PURPOSE:To readily provide a capacitor which is high in degree of integration and has a desired capacitance. CONSTITUTION:When the end section of an upper electrode 7 is irradiated with a laser beam by adjusting the energy, beam size, and beam pulse of the laser beam and setting the irradiating coordinate at the end section of an upper electrode 7 so as to prevent a PZT thin film 6 from being damaged, a removed part 8 is formed at the end section. After irradiation, the capacitance of a capacitor is measured and the irradiation is repeated until a desired capacitance is obtained. Therefore, the facing areas of the upper electrode 7 and a lower electrode 5 can be reduced and, even when the capacitance fluctuates more or less in the manufacturing process, the capacitance can be adjusted. |
