发明名称 CRYSTAL DIAMETER MEASURING DEVICE.
摘要 The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan. <IMAGE>
申请公布号 EP0599350(A3) 申请公布日期 1995.08.30
申请号 EP19930119154 申请日期 1993.11.27
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED 发明人 HIRANO, YOSHIHIRO, C/O ISOBE PLANT;BABA, MASAHIKO, C/O ISOBE PLANT
分类号 C30B15/26;C30B35/00;G01B11/08;G01B11/10 主分类号 C30B15/26
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