发明名称 |
CRYSTAL DIAMETER MEASURING DEVICE. |
摘要 |
The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan. <IMAGE> |
申请公布号 |
EP0599350(A3) |
申请公布日期 |
1995.08.30 |
申请号 |
EP19930119154 |
申请日期 |
1993.11.27 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED |
发明人 |
HIRANO, YOSHIHIRO, C/O ISOBE PLANT;BABA, MASAHIKO, C/O ISOBE PLANT |
分类号 |
C30B15/26;C30B35/00;G01B11/08;G01B11/10 |
主分类号 |
C30B15/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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