HIGH POWER WAVEGUIDE ABSORPTION MODULATOR

摘要

A waveguide typo electro-absorptive optical modulator (6) that resists damage to its input facet (12) and methods for minimizing or eliminating optical and electrical damage to the input facet (12) of waveguide type electro-absorptive modulator (6) by fabrication of an electrically isolated region (48) in the modulator's waveguide proximate the input facet (12) by forming an ion implantation region (46) in at least one waveguide confinement rib (44) proximate the input facet (12) a signal contact end (14) on the at least one rib (44) that is recessed from the plane of the input facet (12), or both.