| 摘要 |
PURPOSE:To perform the exchange of parts without lowering the operational ratio of a vacuum apparatus to be operated such as an ion implantation machine, by preliminarily assembling said parts in a separate auxiliary vacuum apparatus to inspect the condition thereof prior to mounting parts to be exchanged to the actual vacuum apparatus and heating said parts. CONSTITUTION:After an ion source head 2 is detached from an ion implantation machine and disassembled to perform cleaning or the exchange of a filament, said head 2 is again assembled and mounted to the chamber main body 1 of an inspection apparatus to constitute a high vacuum chamber. After the main body 1 is evacuated by a vacuum pump and a vacuum leak is inspected, a current is flowed between electrodes 4, 5 to investigate whether a filament is accurately attached. At the same time, the baking of the filament 6 itself and the periphery thereof is performed by the current supply heating of the filament 6. By this parts exchange system, the inspection of the assembling condition can be performed without using an actual vacuum apparatus and the operational ratio of the vacuum apparatus such as ion implantation machine can be enhanced. |
