发明名称 COLD CATHODE ELECTRODE AND ITS MANUFACTURE
摘要 <p>PURPOSE:To provide a cold cathode electrode having less uneven configuration of a cold cathode electrode and uniform property at the time of manufacturing the cold cathode. CONSTITUTION:An aluminum film 13 is formed on an insulating board 11, and an insulating film 12 of a specified pattern is formed thereon. Next, with the insulating film 12 as a mask, the aluminum film 13 is selectively anodized to form an aluminum cone 13a inside the anode oxide film 14. Next, a molybdenum film 5 for a gate electrode is formed in an area where the insulating film 12 for a mask is removed, and the insulating film 12 for a mask is removed.</p>
申请公布号 JPH07220623(A) 申请公布日期 1995.08.18
申请号 JP19940011722 申请日期 1994.02.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 HARADA HIROTSUGU
分类号 H01J9/02;H01J1/30;H01J1/304;(IPC1-7):H01J9/02 主分类号 H01J9/02
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