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发明名称
Hollow cathode gun and deposition device for ion plating process.
摘要
申请公布号
EP0278494(B1)
申请公布日期
1995.08.16
申请号
EP19880101960
申请日期
1988.02.10
申请人
KAWASAKI STEEL CORPORATION;NIHON SHINKU GIJUTSU KABUSHIKI KAISHA
发明人
INOKUTI, YUKIO C/O TECHNICAL RESEARCH DIVISION;OHKUBO, OSAMU
分类号
C23C14/28;H01J1/02;H01J37/305;(IPC1-7):H01J1/02;H01J37/32
主分类号
C23C14/28
代理机构
代理人
主权项
地址
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