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发明名称
摘要
申请公布号	JPH0773128(B2)	申请公布日期	1995.08.02
申请号	JP19920310541	申请日期	1992.11.19
申请人		发明人
分类号	H01L21/76;H01L21/336;H01L29/78;(IPC1-7):H01L29/78	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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