发明名称 ACCELERATION SENSOR DEVICE AND PREPARATION THEREOF
摘要 PURPOSE: To provide an acceleration sensor suitable especially for application for vehicles by constituting a capacitor by overlaying a source electrode plate on a detection electrode while keeping a selected positioning relation at a prescribed gap between them. CONSTITUTION: A base 16 having at least an upper face 26 of an electric insulating material is provided with a conductive detection electrode plate 2 on the upper face and at least one hole 32 between the upper face 26 and the bottom face. A conductive metal plate, that is a plate 40, is constituted of an installation part 40a, a source electrode part 40i, and beam means 40b, c to unitedly join these parts. The installation part 40a is installed and fixed in the end part of a conductive element and the electrode part 40i is kept at a selected distance from the electrode 24. The conductive element is electrically connected with a conductive circuit extended to the hole 32 from the upper face 26 of the substrate 16. Once the plate 40 is fixed in a pin 36, the axial position of the pin 36 is so adjusted as to give a selected capacitance level between the electrode 24 and the electrode part 40i.
申请公布号 JPH07198746(A) 申请公布日期 1995.08.01
申请号 JP19940269975 申请日期 1994.11.02
申请人 TEXAS INSTR INC <TI> 发明人 RARII KEI JIYONSON;ERITSUKU PII RAIDOMAISUTAA;ROBAATO OO SAUSUWAASU;MAIKURU DEII GOUIN;UIRIAMU SHIRUBA;ANDORIYUU EI AMATORUDA JIYUNIA
分类号 G01P1/02;G01P15/125;H01L29/84 主分类号 G01P1/02
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