SEMICONDUCTOR ACCELERATION SENSOR

摘要

PURPOSE:To provide a semiconductor acceleration sensor from which a stable output having a high S/N can be obtained in corresponding to the stress applied to a flexible part. CONSTITUTION:A FET(field effect transistor) 3 which outputs the stress applied to the flexible part 10 of a semiconductor substrate as a change in drain current is provided near the fixed end of the flexible part 10 and a P-type semiconductor layer 105 fixed at a low potential is provided below the active layer of the FET 3. In addition, a feeding line 50 is wired along the outer periphery of the flexible part 10 near the outer periphery and a bonding pad 45 at one end of the line 50 is fixed at a low potential. Another bonding pad 46 at the other end of the line 50 is connected to a voltage Vcc through a resistor R.