摘要 |
<p>PURPOSE:To prevent leakage even when crack is generated on a ceramics inner tube by composing a ceramics lining tube, serially from inner, of the ceramics inner tube, an adhesive or charging material, and an outer film tube, and coating the ceramics inner tube with a thermally contracting resin tube. CONSTITUTION:A ceramics lining tube 1 is mainly composed of, serially from inside, a sleeve-like ceramics inner tube 2, a thermally contracting resin tube 3 coating it, an adhesive or charging material 5, and an outer rilm tube 4. A groove 6 is formed on at least one of end surfaces 2a of the ceramics inner tube 2 in a circumferential direction, while flanges 9 are formed on ends of the outer film tube 4. Various kinds of oxidezed ceramics such as alimina or zirconia are used for the sleeve-like ceramics inner tube 2. In addition to them, metarial having abrasion resistance and chamical stability against slurry such as silicon nitrize or silicon carbide is used.</p> |